Product
- Slot-Type Wet Process Eqpt.
Slot-Type Wet Process Eqpt.
- Single-Wafer Wet Process Eqpt.
Single-Wafer Wet Process Eqpt.
- Auxiliary Eqpt.
Auxiliary Eqpt.
- Dryer
Dryer
- Chamfering Machine
Chamfering Machine
Dryer
Marangoni Dryer is suitable for drying silicon carbide, polysili-con,and silicon-based wafers,supporting 4/6/8/12-inch wafers with optional thicknesses (350μm-1400μm), adapting to diver-
se application scenarios. Based on the Marangoni effect,it uses nitrogen to carry IPA to create a surface tension gradient for e-fficient drying, supporting three drying methods: wafer lifting, slow drainage, and swing. Equipped with an up/down convey-ing mechanism, it enables a cassetteless process,preventing p-
oor drying at the contact points between the cassette and wa-
fer, improving drying uniformity.
產品詳情
| Model | CGB-MD150-C | CGB-MD200-C | CGB-MD200-P | CGB-MD300-C | CGB-MD300-P |
| Wafer Specifi cation | 6inch （with cassette） | 8inch （with cassette） | 8inch （no cassette） | 12inch （with cassette） | 12inch （no cassette） |
| Chemical Circu lation | pneumatic diaphragm type | ||||
| Drainage | electromagnetic type | ||||
| Liquid Filter | PFA integrated | ||||
| Gas Filter | SUS integrated | ||||
| N? Heater | Independent temperature controller | ||||
| Liquid Level Detection | N? micro-pressure level | ||||
Temperature Management | Temperature sensor; platinum RTD | ||||
Post-Processing Liquid Residue | No | ||||
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