Product
- Slot-Type Wet Process Eqpt.
Slot-Type Wet Process Eqpt.
- Single-Wafer Wet Process Eqpt.
Single-Wafer Wet Process Eqpt.
- Auxiliary Eqpt.
Auxiliary Eqpt.
- Dryer
Dryer
- Chamfering Machine
Chamfering Machine
Single-Wafer Wet Process Eqpt.
產品詳情
? Compatible with 6-12 inch multi-specs wafers
? Self-cleaning brush head
? Independent flipping module, automatic flipping and cleaning of both sides of the wafer
? Accurate alignment of multi-specs wafers
? Excellent cleaning results
? A variety of safety tests(avoiding Debris producing)
| Applicable Process | Mask Clean |
| Applicable Size | 4&6 inch,6&8 inch |
| Loadport type | Open Cassette |
| Chemicals | ACE/NMP/EKC/IPA |
| Particle | ≤30ea @0.2μm |
| Frangementation Rate | ≤0.1‰ |
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